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| dc.contributor.author | Miklyaev Y.V. | en |
| dc.contributor.author | Karpeev S.V. | en |
| dc.contributor.author | Dyachenko P.N. | en |
| dc.contributor.author | Pavelyev V.S. | en |
| dc.date.accessioned | 2018-10-16T06:53:44Z | |
| dc.date.available | 2018-10-16T06:53:44Z | |
| dc.date.issued | 2009 | |
| dc.identifier.issn | 9500340 | |
| dc.identifier.uri | http://dspace.susu.ru/handle/0001.74/20614 | |
| dc.description.abstract | We report on the fabrication of polymer templates of photonic crystals by means of holographic (or interference) lithography. The grating is written in a SU-8 photoresist using a He-Cd laser of wavelength 442 nm. The use of the wavelength found within the photoresist low absorption band enables fabricating structures that are uniform in depth. Parameters of the photoresist exposure and development for obtaining a porous structure corresponding to an orthorhombic lattice are determined. | en] |
| dc.language.iso | English | |
| dc.relation.ispartof | Journal of Modern Optics | en] |
| dc.subject | Absorption band | en] |
| dc.subject | He-Cd laser | en] |
| dc.subject | He-Cd lasers | en] |
| dc.subject | Interference lithography | en] |
| dc.subject | Orthorhombic lattices | en] |
| dc.subject | Polymer templates | en] |
| dc.subject | Porous structures | en] |
| dc.subject | SU-8 photoresist | en] |
| dc.subject | Three dimensional photonic crystals | en] |
| dc.subject | Absorption | en] |
| dc.subject | Crystal atomic structure | en] |
| dc.subject | Helium | en] |
| dc.subject | Lasers | en] |
| dc.subject | Light absorption | en] |
| dc.subject | Lithography | en] |
| dc.subject | Photoresistors | en] |
| dc.subject | Photoresists | en] |
| dc.subject | Silicon on insulator technology | en] |
| dc.subject | Surface treatment | en] |
| dc.subject | Photonic crystals | en] |
| dc.title | Fabrication of three-dimensional photonic crystals by interference lithography with low light absorption | en |
| dc.type | Article | en] |
| dc.identifier.doi | 10.1080/09500340902919469 | |
| dc.identifier.scopus | https://www.scopus.com/inward/record.uri?eid=2-s2.0-67651202196&doi=10.1080%2f09500340902919469&partnerID=40&md5=5472b76aee6e9a663c9ab1c941f66093 |
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