Структура и свойства углеродных пленок, получаемых электронно-лучевым распылением в вакууме

Abstract

Были получены пленочные образцы распыленного в вакууме и осажденного на нагретую стеклянную подложку графита. С помощью атомносиловой и электронной микроскопии исследована поверхность и элементный состав. Было измерено удельное поверхностное сопротивление пленок и найдена его зависимость от толщины пленки. Graphene, a one-atom thick, two-dimensional sheet of carbon atoms, approve oneself as a promising material for nanoelectronic devices. Here we proposed the method of producing this material by an electron beam evaporation of a carbon crystal in a vacuum chamber (equipment produced by TORR INTERNATIONAL, INC.). We obtained series of samples of films with different thickness and substrate temperatures and measured their surface resistance with a 4-pinned resistance measurer. The samples were measured at room temperature. We found out, that our samples as well as graphene sheets are transparent, while overlapping two films together their transparence decreases. We found out a dependence of thickness and the substrate temperature on the film resistance. Also we found out a dependence of the substrate temperature on an undulation of obtained carbon films.