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Fabrication of three-dimensional metallodielectric photonic crystals by interference lithography

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dc.contributor.author Dyachenko P.N. en
dc.contributor.author Karpeev S.V. en
dc.contributor.author Fesik E.V. en
dc.contributor.author Miklyaev Yu.V. en
dc.contributor.author Pavelyev V.S. en
dc.contributor.author Malchikov G.D. en
dc.date.accessioned 2018-10-16T06:37:41Z
dc.date.available 2018-10-16T06:37:41Z
dc.date.issued 2010
dc.identifier.isbn 9780819481863
dc.identifier.issn 0277786X
dc.identifier.uri http://dspace.susu.ru/handle/0001.74/20501
dc.description.abstract We report on the fabrication of metallodielectric photonic crystals by means of interference (or holographic) lithography and subsequent coating by gold nanoparticles. The grating is realized in a SU-8 photoresist using a He-Cd laser of wavelength 442 nm. The use of the wavelength found within the photoresist low absorption band enables fabricating structures that are uniform in depth. Parameters of the photoresist exposure and development for obtaining a porous structure corresponding to an orthorhombic lattice are determined. Coating of photonic crystals by gold nanoparticles is realized by reduction of chloroauric acid by a number of reductants in a water solution. This research shows that the combination of interference lithography and chemical coating by metal is attractive for the fabrication of metallodielectric photonic crystals. © 2010 Copyright SPIE - The International Society for Optical Engineering. en]
dc.description.sponsorship The Society of Photo-Optical Instrumentation Engineers (SPIE);Brussels Photonics Team (B-PHOT);Brussels-Capital Region;Fonds Wetenschappelijk Onderzoek (FWO);International Commission for Optics (ICO);Ville de Bruxelles en
dc.language.iso English
dc.relation.ispartof Proceedings of SPIE - The International Society for Optical Engineering en]
dc.subject Absorption band en]
dc.subject Chemical coatings en]
dc.subject Chloroauric acid en]
dc.subject Gold Nanoparticles en]
dc.subject He-Cd lasers en]
dc.subject Interference lithography en]
dc.subject Metallo-dielectric photonic crystals en]
dc.subject Orthorhombic lattices en]
dc.subject Porous structures en]
dc.subject Reductants en]
dc.subject SU-8 photoresist en]
dc.subject Water solutions en]
dc.subject Coatings en]
dc.subject Crystal atomic structure en]
dc.subject Fabrication en]
dc.subject Gold en]
dc.subject Gold coatings en]
dc.subject Lithography en]
dc.subject Nanoparticles en]
dc.subject Photonic devices en]
dc.subject Photoresists en]
dc.subject Photonic crystals en]
dc.title Fabrication of three-dimensional metallodielectric photonic crystals by interference lithography en
dc.type Conference Paper en]
dc.identifier.doi 10.1117/12.853791
dc.identifier.scopus https://www.scopus.com/inward/record.uri?eid=2-s2.0-79251506046&doi=10.1117%2f12.853791&partnerID=40&md5=73777ac4b5fe36e68679c5538f366124
dc.conference.name Photonic Crystal Materials and Devices IX en]
dc.conference.date 12 April 2010 through 15 April 2010


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